"Multi-functional high-sensitivity micro-nano electronic sensing detection system" project passed the test

From April 7th to 8th, the experts from the Bureau of Condition Protection and Finance of the Chinese Academy of Sciences organized an on-site acceptance of the “multifunctional high-sensitivity micro-nano electronic sensing detection system” of the scientific research equipment development project undertaken by the Suzhou Nanotechnology and Nano-Bionics Institute of the Chinese Academy of Sciences. .

The acceptance panel heard project work reports, financial reports, user reports, and test reports. The on-site inspection of the operation of the development equipment, review of relevant documents and financial accounts. Through inquiry and discussion, the expert group unanimously agreed that the project has successfully completed the research and development tasks, and the major technical indicators have reached or surpassed the targets specified in the implementation plan. And under the support of this research and development equipment, it has achieved excellent scientific research results, published 8 SCI papers in internationally renowned periodicals such as Advanced Materials, and applied for 12 patents, and the related patents were licensed for transfer. The expert group unanimously agreed that the “multi-functional high-sensitivity micro-nano electronic sensor detection system” research project passed the acceptance.

This project aims at on-line detection requirements for high-sensitivity, high temporal/spatial resolution and comprehensiveness of micro-electronic sensor components, and innovatively develops in situ real-time detection of single or multiple quantities of high sensitivity such as mechanics, biology, biology, and optics. Multi-function sensor detection system prototype.

The system is mainly based on self-developed high-precision new type micro-nano electronic sensor array and MEMS capacitive micro-nano sensor probe as the core, with chemical/bio/light/force micro/nano sensor characterization test platform and integrated distributed I/O. The circuit of the module is integrated with the related automation control software system. The system was successfully developed through the interdisciplinary fusion of “Chemical/ Health/Light/Force-Nanoscale-information”, the nano-scale sensors and nano-sensors such as nano-scale sensors and nano-scale sensors. A breakthrough has been made to lay the foundation for the theory, design, characterization and manufacturing of micro-nano sensor devices, and the formation of independent intellectual property testing technology will become an important scientific research device for promoting micro-nano electronic sensor research.

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